5/26/2010	12:02:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/26/2010	12:02:01 PM	Recipe started at 12:02 PM
5/26/2010	12:02:01 PM	H2 valve closed
5/26/2010	12:02:01 PM	BCl3 valve closed
5/26/2010	12:02:02 PM	PH3 valve closed
5/26/2010	12:02:02 PM	SiCl4 pre valve closed
5/26/2010	12:02:02 PM	SiCl4 post valve closed
5/26/2010	12:02:02 PM	Main Vac valve closed
5/26/2010	12:02:02 PM	Bypass valve closed
5/26/2010	12:02:02 PM	Bubbler valve closed
5/26/2010	12:02:02 PM	Helium valve opened
5/26/2010	12:02:02 PM	Helium MFC set to  500.000000
5/26/2010	12:02:02 PM	H2 MFC set to  0.000000
5/26/2010	12:02:02 PM	BCl3 MFC set to  0.000000
5/26/2010	12:02:02 PM	PHl3 MFC set to  0.000000
5/26/2010	12:02:02 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:02:02 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:02:02 PM	Tube furnace set to 0
5/26/2010	12:03:22 PM	Helium valve closed
5/26/2010	12:03:22 PM	H2 valve closed
5/26/2010	12:03:22 PM	BCl3 valve closed
5/26/2010	12:03:22 PM	PH3 valve closed
5/26/2010	12:03:22 PM	SiCl4 pre valve closed
5/26/2010	12:03:22 PM	SiCl4 post valve closed
5/26/2010	12:03:22 PM	Main Vac valve closed
5/26/2010	12:03:22 PM	Bypass valve closed
5/26/2010	12:03:22 PM	Bubbler valve closed
5/26/2010	12:03:22 PM	Helium MFC set to  0.000000
5/26/2010	12:03:22 PM	H2 MFC set to  0.000000
5/26/2010	12:03:22 PM	BCl3 MFC set to  0.000000
5/26/2010	12:03:22 PM	PHl3 MFC set to  0.000000
5/26/2010	12:03:22 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:03:22 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:03:22 PM	Tube furnace set to 0
5/26/2010	12:03:23 PM	Run finished at 12:03 PM
5/26/2010	12:03:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/26/2010	12:22:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	12:22:33 PM	Recipe started at 12:22 PM
5/26/2010	12:22:33 PM	H2 valve closed
5/26/2010	12:22:33 PM	BCl3 valve closed
5/26/2010	12:22:33 PM	PH3 valve closed
5/26/2010	12:22:33 PM	SiCl4 pre valve closed
5/26/2010	12:22:33 PM	SiCl4 post valve closed
5/26/2010	12:22:33 PM	Main Vac valve closed
5/26/2010	12:22:33 PM	Bypass valve closed
5/26/2010	12:22:33 PM	Bubbler valve closed
5/26/2010	12:22:33 PM	Helium valve opened
5/26/2010	12:22:33 PM	Helium MFC set to  500.000000
5/26/2010	12:22:33 PM	H2 MFC set to  0.000000
5/26/2010	12:22:33 PM	BCl3 MFC set to  0.000000
5/26/2010	12:22:33 PM	PHl3 MFC set to  0.000000
5/26/2010	12:22:33 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:22:33 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:22:33 PM	Tube furnace set to 0
5/26/2010	12:22:35 PM	Helium valve closed
5/26/2010	12:22:35 PM	H2 valve closed
5/26/2010	12:22:35 PM	BCl3 valve closed
5/26/2010	12:22:35 PM	PH3 valve closed
5/26/2010	12:22:35 PM	SiCl4 pre valve closed
5/26/2010	12:22:35 PM	SiCl4 post valve closed
5/26/2010	12:22:35 PM	Main Vac valve closed
5/26/2010	12:22:35 PM	Bypass valve closed
5/26/2010	12:22:35 PM	Bubbler valve closed
5/26/2010	12:22:35 PM	Helium MFC set to  0.000000
5/26/2010	12:22:35 PM	H2 MFC set to  0.000000
5/26/2010	12:22:35 PM	BCl3 MFC set to  0.000000
5/26/2010	12:22:35 PM	PHl3 MFC set to  0.000000
5/26/2010	12:22:35 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:22:35 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:22:35 PM	Tube furnace set to 0
5/26/2010	12:22:50 PM	Helium valve closed
5/26/2010	12:22:50 PM	H2 valve closed
5/26/2010	12:22:50 PM	BCl3 valve closed
5/26/2010	12:22:50 PM	PH3 valve closed
5/26/2010	12:22:50 PM	SiCl4 pre valve closed
5/26/2010	12:22:50 PM	SiCl4 post valve closed
5/26/2010	12:22:50 PM	Main Vac valve closed
5/26/2010	12:22:50 PM	Bubbler valve closed
5/26/2010	12:22:50 PM	Bypass valve opened
5/26/2010	12:22:50 PM	Helium MFC set to  0.000000
5/26/2010	12:22:50 PM	H2 MFC set to  0.000000
5/26/2010	12:22:50 PM	BCl3 MFC set to  0.000000
5/26/2010	12:22:50 PM	PHl3 MFC set to  0.000000
5/26/2010	12:22:50 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:22:50 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:22:50 PM	Tube furnace set to 0
5/26/2010	12:23:37 PM	Helium valve closed
5/26/2010	12:23:37 PM	H2 valve closed
5/26/2010	12:23:37 PM	BCl3 valve closed
5/26/2010	12:23:37 PM	PH3 valve closed
5/26/2010	12:23:37 PM	SiCl4 pre valve closed
5/26/2010	12:23:37 PM	SiCl4 post valve closed
5/26/2010	12:23:37 PM	Bubbler valve closed
5/26/2010	12:23:37 PM	Main Vac valve opened
5/26/2010	12:23:37 PM	Bypass valve opened
5/26/2010	12:23:37 PM	Helium MFC set to  0.000000
5/26/2010	12:23:37 PM	H2 MFC set to  0.000000
5/26/2010	12:23:37 PM	BCl3 MFC set to  0.000000
5/26/2010	12:23:37 PM	PHl3 MFC set to  0.000000
5/26/2010	12:23:37 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:23:37 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:23:37 PM	Tube furnace set to 0
5/26/2010	12:28:37 PM	H2 valve closed
5/26/2010	12:28:37 PM	BCl3 valve closed
5/26/2010	12:28:37 PM	PH3 valve closed
5/26/2010	12:28:37 PM	SiCl4 pre valve closed
5/26/2010	12:28:37 PM	SiCl4 post valve closed
5/26/2010	12:28:37 PM	Main Vac valve closed
5/26/2010	12:28:37 PM	Bypass valve closed
5/26/2010	12:28:37 PM	Bubbler valve closed
5/26/2010	12:28:37 PM	Helium valve opened
5/26/2010	12:28:37 PM	Helium MFC set to  500.000000
5/26/2010	12:28:37 PM	H2 MFC set to  0.000000
5/26/2010	12:28:37 PM	BCl3 MFC set to  0.000000
5/26/2010	12:28:37 PM	PHl3 MFC set to  0.000000
5/26/2010	12:28:37 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:28:37 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:28:37 PM	Tube furnace set to 0
5/26/2010	12:29:59 PM	Helium valve closed
5/26/2010	12:29:59 PM	H2 valve closed
5/26/2010	12:29:59 PM	BCl3 valve closed
5/26/2010	12:29:59 PM	PH3 valve closed
5/26/2010	12:29:59 PM	SiCl4 pre valve closed
5/26/2010	12:29:59 PM	SiCl4 post valve closed
5/26/2010	12:29:59 PM	Main Vac valve closed
5/26/2010	12:29:59 PM	Bypass valve closed
5/26/2010	12:29:59 PM	Bubbler valve closed
5/26/2010	12:29:59 PM	Helium MFC set to  0.000000
5/26/2010	12:29:59 PM	H2 MFC set to  0.000000
5/26/2010	12:29:59 PM	BCl3 MFC set to  0.000000
5/26/2010	12:29:59 PM	PHl3 MFC set to  0.000000
5/26/2010	12:29:59 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:29:59 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:29:59 PM	Tube furnace set to 0
5/26/2010	12:30:14 PM	Helium valve closed
5/26/2010	12:30:14 PM	H2 valve closed
5/26/2010	12:30:14 PM	BCl3 valve closed
5/26/2010	12:30:14 PM	PH3 valve closed
5/26/2010	12:30:14 PM	SiCl4 pre valve closed
5/26/2010	12:30:14 PM	SiCl4 post valve closed
5/26/2010	12:30:14 PM	Main Vac valve closed
5/26/2010	12:30:14 PM	Bubbler valve closed
5/26/2010	12:30:14 PM	Bypass valve opened
5/26/2010	12:30:14 PM	Helium MFC set to  0.000000
5/26/2010	12:30:14 PM	H2 MFC set to  0.000000
5/26/2010	12:30:14 PM	BCl3 MFC set to  0.000000
5/26/2010	12:30:14 PM	PHl3 MFC set to  0.000000
5/26/2010	12:30:15 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:30:15 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:30:15 PM	Tube furnace set to 0
5/26/2010	12:30:48 PM	Helium valve closed
5/26/2010	12:30:48 PM	H2 valve closed
5/26/2010	12:30:48 PM	BCl3 valve closed
5/26/2010	12:30:48 PM	PH3 valve closed
5/26/2010	12:30:48 PM	SiCl4 pre valve closed
5/26/2010	12:30:48 PM	SiCl4 post valve closed
5/26/2010	12:30:48 PM	Bubbler valve closed
5/26/2010	12:30:48 PM	Main Vac valve opened
5/26/2010	12:30:48 PM	Bypass valve opened
5/26/2010	12:30:48 PM	Helium MFC set to  0.000000
5/26/2010	12:30:48 PM	H2 MFC set to  0.000000
5/26/2010	12:30:48 PM	BCl3 MFC set to  0.000000
5/26/2010	12:30:48 PM	PHl3 MFC set to  0.000000
5/26/2010	12:30:48 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:30:48 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:30:48 PM	Tube furnace set to 0
5/26/2010	12:35:48 PM	H2 valve closed
5/26/2010	12:35:48 PM	BCl3 valve closed
5/26/2010	12:35:48 PM	PH3 valve closed
5/26/2010	12:35:48 PM	SiCl4 pre valve closed
5/26/2010	12:35:48 PM	SiCl4 post valve closed
5/26/2010	12:35:48 PM	Main Vac valve closed
5/26/2010	12:35:48 PM	Bypass valve closed
5/26/2010	12:35:48 PM	Bubbler valve closed
5/26/2010	12:35:48 PM	Helium valve opened
5/26/2010	12:35:48 PM	Helium MFC set to  500.000000
5/26/2010	12:35:48 PM	H2 MFC set to  0.000000
5/26/2010	12:35:48 PM	BCl3 MFC set to  0.000000
5/26/2010	12:35:48 PM	PHl3 MFC set to  0.000000
5/26/2010	12:35:48 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:35:48 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:35:48 PM	Tube furnace set to 0
5/26/2010	12:37:11 PM	Helium valve closed
5/26/2010	12:37:11 PM	H2 valve closed
5/26/2010	12:37:11 PM	BCl3 valve closed
5/26/2010	12:37:11 PM	PH3 valve closed
5/26/2010	12:37:11 PM	SiCl4 pre valve closed
5/26/2010	12:37:11 PM	SiCl4 post valve closed
5/26/2010	12:37:11 PM	Main Vac valve closed
5/26/2010	12:37:11 PM	Bypass valve closed
5/26/2010	12:37:11 PM	Bubbler valve closed
5/26/2010	12:37:11 PM	Helium MFC set to  0.000000
5/26/2010	12:37:11 PM	H2 MFC set to  0.000000
5/26/2010	12:37:11 PM	BCl3 MFC set to  0.000000
5/26/2010	12:37:11 PM	PHl3 MFC set to  0.000000
5/26/2010	12:37:11 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:37:11 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:37:11 PM	Tube furnace set to 0
5/26/2010	12:37:26 PM	Helium valve closed
5/26/2010	12:37:26 PM	H2 valve closed
5/26/2010	12:37:26 PM	BCl3 valve closed
5/26/2010	12:37:26 PM	PH3 valve closed
5/26/2010	12:37:26 PM	SiCl4 pre valve closed
5/26/2010	12:37:26 PM	SiCl4 post valve closed
5/26/2010	12:37:26 PM	Main Vac valve closed
5/26/2010	12:37:26 PM	Bubbler valve closed
5/26/2010	12:37:26 PM	Bypass valve opened
5/26/2010	12:37:26 PM	Helium MFC set to  0.000000
5/26/2010	12:37:26 PM	H2 MFC set to  0.000000
5/26/2010	12:37:26 PM	BCl3 MFC set to  0.000000
5/26/2010	12:37:26 PM	PHl3 MFC set to  0.000000
5/26/2010	12:37:26 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:37:26 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:37:26 PM	Tube furnace set to 0
5/26/2010	12:37:59 PM	Helium valve closed
5/26/2010	12:37:59 PM	H2 valve closed
5/26/2010	12:37:59 PM	BCl3 valve closed
5/26/2010	12:37:59 PM	PH3 valve closed
5/26/2010	12:37:59 PM	SiCl4 pre valve closed
5/26/2010	12:37:59 PM	SiCl4 post valve closed
5/26/2010	12:37:59 PM	Bubbler valve closed
5/26/2010	12:37:59 PM	Main Vac valve opened
5/26/2010	12:37:59 PM	Bypass valve opened
5/26/2010	12:37:59 PM	Helium MFC set to  0.000000
5/26/2010	12:37:59 PM	H2 MFC set to  0.000000
5/26/2010	12:37:59 PM	BCl3 MFC set to  0.000000
5/26/2010	12:37:59 PM	PHl3 MFC set to  0.000000
5/26/2010	12:37:59 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:37:59 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:37:59 PM	Tube furnace set to 0
5/26/2010	12:41:02 PM	Run aborted at 12:41 PM
5/26/2010	12:41:02 PM	Helium valve closed
5/26/2010	12:41:02 PM	H2 valve closed
5/26/2010	12:41:02 PM	BCl3 valve closed
5/26/2010	12:41:02 PM	PH3 valve closed
5/26/2010	12:41:02 PM	SiCl4 pre valve closed
5/26/2010	12:41:02 PM	SiCl4 post valve closed
5/26/2010	12:41:02 PM	Bypass valve closed
5/26/2010	12:41:02 PM	Main Vac valve closed
5/26/2010	12:41:02 PM	Bubbler valve closed
5/26/2010	12:41:02 PM	Helium MFC set to  0.000000
5/26/2010	12:41:02 PM	H2 MFC set to  0.000000
5/26/2010	12:41:02 PM	BCl3 MFC set to  0.000000
5/26/2010	12:41:02 PM	PHl3 MFC set to  0.000000
5/26/2010	12:41:02 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:41:03 PM	Tube furnace set to 0
5/26/2010	12:41:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	12:41:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	12:41:11 PM	Recipe started at 12:41 PM
5/26/2010	12:41:11 PM	H2 valve closed
5/26/2010	12:41:11 PM	BCl3 valve closed
5/26/2010	12:41:11 PM	PH3 valve closed
5/26/2010	12:41:11 PM	SiCl4 pre valve closed
5/26/2010	12:41:11 PM	SiCl4 post valve closed
5/26/2010	12:41:11 PM	Main Vac valve closed
5/26/2010	12:41:11 PM	Bypass valve closed
5/26/2010	12:41:11 PM	Bubbler valve closed
5/26/2010	12:41:11 PM	Helium valve opened
5/26/2010	12:41:11 PM	Helium MFC set to  500.000000
5/26/2010	12:41:11 PM	H2 MFC set to  0.000000
5/26/2010	12:41:11 PM	BCl3 MFC set to  0.000000
5/26/2010	12:41:11 PM	PHl3 MFC set to  0.000000
5/26/2010	12:41:11 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:41:11 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:41:11 PM	Tube furnace set to 0
5/26/2010	12:42:33 PM	Helium valve closed
5/26/2010	12:42:33 PM	H2 valve closed
5/26/2010	12:42:33 PM	BCl3 valve closed
5/26/2010	12:42:33 PM	PH3 valve closed
5/26/2010	12:42:33 PM	SiCl4 pre valve closed
5/26/2010	12:42:33 PM	SiCl4 post valve closed
5/26/2010	12:42:33 PM	Main Vac valve closed
5/26/2010	12:42:33 PM	Bypass valve closed
5/26/2010	12:42:33 PM	Bubbler valve closed
5/26/2010	12:42:33 PM	Helium MFC set to  0.000000
5/26/2010	12:42:33 PM	H2 MFC set to  0.000000
5/26/2010	12:42:33 PM	BCl3 MFC set to  0.000000
5/26/2010	12:42:33 PM	PHl3 MFC set to  0.000000
5/26/2010	12:42:33 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:42:33 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:42:33 PM	Tube furnace set to 0
5/26/2010	12:42:48 PM	Helium valve closed
5/26/2010	12:42:48 PM	H2 valve closed
5/26/2010	12:42:48 PM	BCl3 valve closed
5/26/2010	12:42:48 PM	PH3 valve closed
5/26/2010	12:42:48 PM	SiCl4 pre valve closed
5/26/2010	12:42:48 PM	SiCl4 post valve closed
5/26/2010	12:42:48 PM	Main Vac valve closed
5/26/2010	12:42:48 PM	Bubbler valve closed
5/26/2010	12:42:48 PM	Bypass valve opened
5/26/2010	12:42:48 PM	Helium MFC set to  0.000000
5/26/2010	12:42:48 PM	H2 MFC set to  0.000000
5/26/2010	12:42:48 PM	BCl3 MFC set to  0.000000
5/26/2010	12:42:48 PM	PHl3 MFC set to  0.000000
5/26/2010	12:42:48 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:42:48 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:42:48 PM	Tube furnace set to 0
5/26/2010	12:43:21 PM	Helium valve closed
5/26/2010	12:43:21 PM	H2 valve closed
5/26/2010	12:43:21 PM	BCl3 valve closed
5/26/2010	12:43:21 PM	PH3 valve closed
5/26/2010	12:43:21 PM	SiCl4 pre valve closed
5/26/2010	12:43:21 PM	SiCl4 post valve closed
5/26/2010	12:43:21 PM	Bubbler valve closed
5/26/2010	12:43:21 PM	Main Vac valve opened
5/26/2010	12:43:21 PM	Bypass valve opened
5/26/2010	12:43:21 PM	Helium MFC set to  0.000000
5/26/2010	12:43:21 PM	H2 MFC set to  0.000000
5/26/2010	12:43:21 PM	BCl3 MFC set to  0.000000
5/26/2010	12:43:21 PM	PHl3 MFC set to  0.000000
5/26/2010	12:43:21 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:43:21 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:43:21 PM	Tube furnace set to 0
5/26/2010	12:48:21 PM	H2 valve closed
5/26/2010	12:48:21 PM	BCl3 valve closed
5/26/2010	12:48:21 PM	PH3 valve closed
5/26/2010	12:48:21 PM	SiCl4 pre valve closed
5/26/2010	12:48:21 PM	SiCl4 post valve closed
5/26/2010	12:48:21 PM	Main Vac valve closed
5/26/2010	12:48:21 PM	Bypass valve closed
5/26/2010	12:48:21 PM	Bubbler valve closed
5/26/2010	12:48:21 PM	Helium valve opened
5/26/2010	12:48:21 PM	Helium MFC set to  500.000000
5/26/2010	12:48:21 PM	H2 MFC set to  0.000000
5/26/2010	12:48:21 PM	BCl3 MFC set to  0.000000
5/26/2010	12:48:21 PM	PHl3 MFC set to  0.000000
5/26/2010	12:48:21 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:48:21 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:48:21 PM	Tube furnace set to 0
5/26/2010	12:49:44 PM	Helium valve closed
5/26/2010	12:49:44 PM	H2 valve closed
5/26/2010	12:49:44 PM	BCl3 valve closed
5/26/2010	12:49:44 PM	PH3 valve closed
5/26/2010	12:49:44 PM	SiCl4 pre valve closed
5/26/2010	12:49:44 PM	SiCl4 post valve closed
5/26/2010	12:49:44 PM	Main Vac valve closed
5/26/2010	12:49:44 PM	Bypass valve closed
5/26/2010	12:49:44 PM	Bubbler valve closed
5/26/2010	12:49:44 PM	Helium MFC set to  0.000000
5/26/2010	12:49:44 PM	H2 MFC set to  0.000000
5/26/2010	12:49:44 PM	BCl3 MFC set to  0.000000
5/26/2010	12:49:44 PM	PHl3 MFC set to  0.000000
5/26/2010	12:49:44 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:49:44 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:49:44 PM	Tube furnace set to 0
5/26/2010	12:49:59 PM	Helium valve closed
5/26/2010	12:49:59 PM	H2 valve closed
5/26/2010	12:49:59 PM	BCl3 valve closed
5/26/2010	12:49:59 PM	PH3 valve closed
5/26/2010	12:49:59 PM	SiCl4 pre valve closed
5/26/2010	12:49:59 PM	SiCl4 post valve closed
5/26/2010	12:49:59 PM	Main Vac valve closed
5/26/2010	12:49:59 PM	Bubbler valve closed
5/26/2010	12:49:59 PM	Bypass valve opened
5/26/2010	12:49:59 PM	Helium MFC set to  0.000000
5/26/2010	12:49:59 PM	H2 MFC set to  0.000000
5/26/2010	12:49:59 PM	BCl3 MFC set to  0.000000
5/26/2010	12:49:59 PM	PHl3 MFC set to  0.000000
5/26/2010	12:49:59 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:49:59 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:49:59 PM	Tube furnace set to 0
5/26/2010	12:50:33 PM	Helium valve closed
5/26/2010	12:50:33 PM	H2 valve closed
5/26/2010	12:50:33 PM	BCl3 valve closed
5/26/2010	12:50:33 PM	PH3 valve closed
5/26/2010	12:50:33 PM	SiCl4 pre valve closed
5/26/2010	12:50:33 PM	SiCl4 post valve closed
5/26/2010	12:50:33 PM	Bubbler valve closed
5/26/2010	12:50:33 PM	Main Vac valve opened
5/26/2010	12:50:33 PM	Bypass valve opened
5/26/2010	12:50:33 PM	Helium MFC set to  0.000000
5/26/2010	12:50:33 PM	H2 MFC set to  0.000000
5/26/2010	12:50:33 PM	BCl3 MFC set to  0.000000
5/26/2010	12:50:33 PM	PHl3 MFC set to  0.000000
5/26/2010	12:50:33 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:50:33 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:50:33 PM	Tube furnace set to 0
5/26/2010	12:55:33 PM	H2 valve closed
5/26/2010	12:55:33 PM	BCl3 valve closed
5/26/2010	12:55:33 PM	PH3 valve closed
5/26/2010	12:55:33 PM	SiCl4 pre valve closed
5/26/2010	12:55:33 PM	SiCl4 post valve closed
5/26/2010	12:55:33 PM	Main Vac valve closed
5/26/2010	12:55:33 PM	Bypass valve closed
5/26/2010	12:55:33 PM	Bubbler valve closed
5/26/2010	12:55:33 PM	Helium valve opened
5/26/2010	12:55:33 PM	Helium MFC set to  500.000000
5/26/2010	12:55:33 PM	H2 MFC set to  0.000000
5/26/2010	12:55:33 PM	BCl3 MFC set to  0.000000
5/26/2010	12:55:33 PM	PHl3 MFC set to  0.000000
5/26/2010	12:55:33 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:55:33 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:55:33 PM	Tube furnace set to 0
5/26/2010	12:56:55 PM	Helium valve closed
5/26/2010	12:56:55 PM	H2 valve closed
5/26/2010	12:56:55 PM	BCl3 valve closed
5/26/2010	12:56:55 PM	PH3 valve closed
5/26/2010	12:56:55 PM	SiCl4 pre valve closed
5/26/2010	12:56:55 PM	SiCl4 post valve closed
5/26/2010	12:56:55 PM	Main Vac valve closed
5/26/2010	12:56:55 PM	Bypass valve closed
5/26/2010	12:56:55 PM	Bubbler valve closed
5/26/2010	12:56:55 PM	Helium MFC set to  0.000000
5/26/2010	12:56:55 PM	H2 MFC set to  0.000000
5/26/2010	12:56:55 PM	BCl3 MFC set to  0.000000
5/26/2010	12:56:55 PM	PHl3 MFC set to  0.000000
5/26/2010	12:56:55 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:56:55 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:56:56 PM	Tube furnace set to 0
5/26/2010	12:57:11 PM	Helium valve closed
5/26/2010	12:57:11 PM	H2 valve closed
5/26/2010	12:57:11 PM	BCl3 valve closed
5/26/2010	12:57:11 PM	PH3 valve closed
5/26/2010	12:57:11 PM	SiCl4 pre valve closed
5/26/2010	12:57:11 PM	SiCl4 post valve closed
5/26/2010	12:57:11 PM	Main Vac valve closed
5/26/2010	12:57:11 PM	Bubbler valve closed
5/26/2010	12:57:11 PM	Bypass valve opened
5/26/2010	12:57:11 PM	Helium MFC set to  0.000000
5/26/2010	12:57:11 PM	H2 MFC set to  0.000000
5/26/2010	12:57:11 PM	BCl3 MFC set to  0.000000
5/26/2010	12:57:11 PM	PHl3 MFC set to  0.000000
5/26/2010	12:57:11 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:57:11 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:57:11 PM	Tube furnace set to 0
5/26/2010	12:57:44 PM	Helium valve closed
5/26/2010	12:57:44 PM	H2 valve closed
5/26/2010	12:57:44 PM	BCl3 valve closed
5/26/2010	12:57:44 PM	PH3 valve closed
5/26/2010	12:57:44 PM	SiCl4 pre valve closed
5/26/2010	12:57:44 PM	SiCl4 post valve closed
5/26/2010	12:57:44 PM	Bubbler valve closed
5/26/2010	12:57:44 PM	Main Vac valve opened
5/26/2010	12:57:44 PM	Bypass valve opened
5/26/2010	12:57:44 PM	Helium MFC set to  0.000000
5/26/2010	12:57:44 PM	H2 MFC set to  0.000000
5/26/2010	12:57:44 PM	BCl3 MFC set to  0.000000
5/26/2010	12:57:44 PM	PHl3 MFC set to  0.000000
5/26/2010	12:57:44 PM	SiCl4 MFC set to  0.000000
5/26/2010	12:57:44 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	12:57:44 PM	Tube furnace set to 0
5/26/2010	1:02:44 PM	Helium valve closed
5/26/2010	1:02:44 PM	H2 valve closed
5/26/2010	1:02:44 PM	BCl3 valve closed
5/26/2010	1:02:44 PM	PH3 valve closed
5/26/2010	1:02:44 PM	SiCl4 pre valve closed
5/26/2010	1:02:44 PM	SiCl4 post valve closed
5/26/2010	1:02:44 PM	Bubbler valve closed
5/26/2010	1:02:44 PM	Main Vac valve opened
5/26/2010	1:02:44 PM	Bypass valve opened
5/26/2010	1:02:44 PM	Helium MFC set to  0.000000
5/26/2010	1:02:44 PM	H2 MFC set to  0.000000
5/26/2010	1:02:44 PM	BCl3 MFC set to  0.000000
5/26/2010	1:02:44 PM	PHl3 MFC set to  0.000000
5/26/2010	1:02:44 PM	SiCl4 MFC set to  0.000000
5/26/2010	1:02:44 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:02:44 PM	Tube furnace set to 0
5/26/2010	1:02:45 PM	Run finished at 1:02 PM
5/26/2010	1:02:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	1:29:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	1:29:56 PM	Recipe started at 1:29 PM
5/26/2010	1:29:56 PM	Helium valve closed
5/26/2010	1:29:56 PM	H2 valve closed
5/26/2010	1:29:56 PM	BCl3 valve closed
5/26/2010	1:29:56 PM	PH3 valve closed
5/26/2010	1:29:56 PM	SiCl4 pre valve closed
5/26/2010	1:29:56 PM	SiCl4 post valve closed
5/26/2010	1:29:56 PM	Main Vac valve closed
5/26/2010	1:29:56 PM	Bypass valve closed
5/26/2010	1:29:56 PM	Bubbler valve closed
5/26/2010	1:29:56 PM	Helium MFC set to  0.000000
5/26/2010	1:29:56 PM	H2 MFC set to  0.000000
5/26/2010	1:29:56 PM	BCl3 MFC set to  0.000000
5/26/2010	1:29:56 PM	PHl3 MFC set to  0.000000
5/26/2010	1:29:56 PM	SiCl4 MFC set to  0.000000
5/26/2010	1:29:56 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:29:56 PM	Tube furnace set to 0
5/26/2010	1:29:56 PM	Run finished at 1:29 PM
5/26/2010	1:29:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	1:30:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2010	1:30:18 PM	Recipe started at 1:30 PM
5/26/2010	1:30:18 PM	Helium valve closed
5/26/2010	1:30:18 PM	H2 valve closed
5/26/2010	1:30:18 PM	BCl3 valve closed
5/26/2010	1:30:18 PM	PH3 valve closed
5/26/2010	1:30:18 PM	SiCl4 pre valve closed
5/26/2010	1:30:18 PM	SiCl4 post valve closed
5/26/2010	1:30:18 PM	Main Vac valve closed
5/26/2010	1:30:18 PM	Bubbler valve closed
5/26/2010	1:30:18 PM	Bypass valve opened
5/26/2010	1:30:18 PM	Helium MFC set to  0.000000
5/26/2010	1:30:18 PM	H2 MFC set to  0.000000
5/26/2010	1:30:18 PM	BCl3 MFC set to  0.000000
5/26/2010	1:30:18 PM	PHl3 MFC set to  0.000000
5/26/2010	1:30:18 PM	SiCl4 MFC set to  0.000000
5/26/2010	1:30:18 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:30:18 PM	Tube furnace set to 0
5/26/2010	1:30:18 PM	Helium valve closed
5/26/2010	1:30:18 PM	H2 valve closed
5/26/2010	1:30:18 PM	BCl3 valve closed
5/26/2010	1:30:18 PM	PH3 valve closed
5/26/2010	1:30:18 PM	SiCl4 pre valve closed
5/26/2010	1:30:18 PM	SiCl4 post valve closed
5/26/2010	1:30:18 PM	Bubbler valve closed
5/26/2010	1:30:18 PM	Main Vac valve opened
5/26/2010	1:30:18 PM	Bypass valve opened
5/26/2010	1:30:18 PM	Helium MFC set to  0.000000
5/26/2010	1:30:18 PM	H2 MFC set to  0.000000
5/26/2010	1:30:18 PM	BCl3 MFC set to  0.000000
5/26/2010	1:30:18 PM	PHl3 MFC set to  0.000000
5/26/2010	1:30:18 PM	SiCl4 MFC set to  0.000000
5/26/2010	1:30:18 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:30:19 PM	Tube furnace set to 0
5/26/2010	1:30:19 PM	Run finished at 1:30 PM
5/26/2010	1:30:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2010	1:31:12 PM	Recipe started at 1:31 PM
5/26/2010	1:31:12 PM	Helium valve closed
5/26/2010	1:31:12 PM	BCl3 valve closed
5/26/2010	1:31:12 PM	PH3 valve closed
5/26/2010	1:31:12 PM	SiCl4 pre valve closed
5/26/2010	1:31:12 PM	SiCl4 post valve closed
5/26/2010	1:31:12 PM	Main Vac valve closed
5/26/2010	1:31:12 PM	Bypass valve closed
5/26/2010	1:31:12 PM	Bubbler valve closed
5/26/2010	1:31:12 PM	H2 valve opened
5/26/2010	1:31:12 PM	Helium MFC set to  0.000000
5/26/2010	1:31:12 PM	H2 MFC set to  500.000000
5/26/2010	1:31:12 PM	BCl3 MFC set to  0.000000
5/26/2010	1:31:12 PM	PHl3 MFC set to  0.000000
5/26/2010	1:31:12 PM	SiCl4 MFC set to  0.000000
5/26/2010	1:31:12 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:31:13 PM	Tube furnace set to 1000
5/26/2010	1:32:35 PM	Helium valve closed
5/26/2010	1:32:35 PM	BCl3 valve closed
5/26/2010	1:32:35 PM	PH3 valve closed
5/26/2010	1:32:35 PM	SiCl4 pre valve closed
5/26/2010	1:32:35 PM	SiCl4 post valve closed
5/26/2010	1:32:35 PM	Main Vac valve closed
5/26/2010	1:32:35 PM	Bypass valve closed
5/26/2010	1:32:35 PM	H2 valve opened
5/26/2010	1:32:35 PM	Bubbler valve opened
5/26/2010	1:32:35 PM	Helium MFC set to  0.000000
5/26/2010	1:32:35 PM	H2 MFC set to  500.000000
5/26/2010	1:32:35 PM	BCl3 MFC set to  0.000000
5/26/2010	1:32:35 PM	PHl3 MFC set to  0.000000
5/26/2010	1:32:35 PM	SiCl4 MFC set to  0.000000
5/26/2010	1:32:35 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:32:35 PM	Tube furnace set to 1000
5/26/2010	1:52:35 PM	Helium valve closed
5/26/2010	1:52:35 PM	PH3 valve closed
5/26/2010	1:52:35 PM	Main Vac valve closed
5/26/2010	1:52:35 PM	Bypass valve closed
5/26/2010	1:52:35 PM	H2 valve opened
5/26/2010	1:52:35 PM	BCl3 valve opened
5/26/2010	1:52:35 PM	SiCl4 pre valve opened
5/26/2010	1:52:35 PM	SiCl4 post valve opened
5/26/2010	1:52:35 PM	Bubbler valve opened
5/26/2010	1:52:35 PM	Helium MFC set to  0.000000
5/26/2010	1:52:35 PM	H2 MFC set to  500.000000
5/26/2010	1:52:35 PM	BCl3 MFC set to  35.000000
5/26/2010	1:52:35 PM	PHl3 MFC set to  0.000000
5/26/2010	1:52:35 PM	SiCl4 MFC set to  32.500000
5/26/2010	1:52:35 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	1:52:35 PM	Tube furnace set to 1000
5/26/2010	2:02:35 PM	Helium valve closed
5/26/2010	2:02:35 PM	BCl3 valve closed
5/26/2010	2:02:35 PM	PH3 valve closed
5/26/2010	2:02:35 PM	SiCl4 pre valve closed
5/26/2010	2:02:35 PM	SiCl4 post valve closed
5/26/2010	2:02:35 PM	Main Vac valve closed
5/26/2010	2:02:35 PM	Bypass valve closed
5/26/2010	2:02:35 PM	H2 valve opened
5/26/2010	2:02:35 PM	Bubbler valve opened
5/26/2010	2:02:35 PM	Helium MFC set to  0.000000
5/26/2010	2:02:35 PM	H2 MFC set to  500.000000
5/26/2010	2:02:35 PM	BCl3 MFC set to  0.000000
5/26/2010	2:02:35 PM	PHl3 MFC set to  0.000000
5/26/2010	2:02:35 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:02:35 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	2:02:35 PM	Tube furnace set to 750
5/26/2010	2:22:35 PM	H2 valve closed
5/26/2010	2:22:35 PM	BCl3 valve closed
5/26/2010	2:22:35 PM	PH3 valve closed
5/26/2010	2:22:35 PM	SiCl4 pre valve closed
5/26/2010	2:22:35 PM	SiCl4 post valve closed
5/26/2010	2:22:35 PM	Main Vac valve closed
5/26/2010	2:22:35 PM	Bypass valve closed
5/26/2010	2:22:35 PM	Helium valve opened
5/26/2010	2:22:35 PM	Bubbler valve opened
5/26/2010	2:22:35 PM	Helium MFC set to  500.000000
5/26/2010	2:22:35 PM	H2 MFC set to  0.000000
5/26/2010	2:22:35 PM	BCl3 MFC set to  0.000000
5/26/2010	2:22:35 PM	PHl3 MFC set to  0.000000
5/26/2010	2:22:35 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:22:35 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	2:22:35 PM	Tube furnace set to 0
5/26/2010	2:37:56 PM	Run aborted at 2:37 PM
5/26/2010	2:37:56 PM	Helium valve closed
5/26/2010	2:37:56 PM	H2 valve closed
5/26/2010	2:37:56 PM	BCl3 valve closed
5/26/2010	2:37:56 PM	PH3 valve closed
5/26/2010	2:37:56 PM	SiCl4 pre valve closed
5/26/2010	2:37:56 PM	SiCl4 post valve closed
5/26/2010	2:37:56 PM	Bypass valve closed
5/26/2010	2:37:56 PM	Main Vac valve closed
5/26/2010	2:37:56 PM	Bubbler valve closed
5/26/2010	2:37:56 PM	Helium MFC set to  0.000000
5/26/2010	2:37:56 PM	H2 MFC set to  0.000000
5/26/2010	2:37:56 PM	BCl3 MFC set to  0.000000
5/26/2010	2:37:56 PM	PHl3 MFC set to  0.000000
5/26/2010	2:37:56 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:37:56 PM	Tube furnace set to 0
5/26/2010	2:54:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	2:54:20 PM	Recipe started at 2:54 PM
5/26/2010	2:54:20 PM	H2 valve closed
5/26/2010	2:54:20 PM	BCl3 valve closed
5/26/2010	2:54:20 PM	PH3 valve closed
5/26/2010	2:54:20 PM	SiCl4 pre valve closed
5/26/2010	2:54:20 PM	SiCl4 post valve closed
5/26/2010	2:54:20 PM	Main Vac valve closed
5/26/2010	2:54:20 PM	Bypass valve closed
5/26/2010	2:54:20 PM	Bubbler valve closed
5/26/2010	2:54:20 PM	Helium valve opened
5/26/2010	2:54:20 PM	Helium MFC set to  500.000000
5/26/2010	2:54:20 PM	H2 MFC set to  0.000000
5/26/2010	2:54:20 PM	BCl3 MFC set to  0.000000
5/26/2010	2:54:20 PM	PHl3 MFC set to  0.000000
5/26/2010	2:54:20 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:54:20 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	2:54:20 PM	Tube furnace set to 0
5/26/2010	2:54:22 PM	Helium valve closed
5/26/2010	2:54:22 PM	H2 valve closed
5/26/2010	2:54:22 PM	BCl3 valve closed
5/26/2010	2:54:22 PM	PH3 valve closed
5/26/2010	2:54:22 PM	SiCl4 pre valve closed
5/26/2010	2:54:22 PM	SiCl4 post valve closed
5/26/2010	2:54:22 PM	Main Vac valve closed
5/26/2010	2:54:22 PM	Bypass valve closed
5/26/2010	2:54:22 PM	Bubbler valve closed
5/26/2010	2:54:22 PM	Helium MFC set to  0.000000
5/26/2010	2:54:22 PM	H2 MFC set to  0.000000
5/26/2010	2:54:22 PM	BCl3 MFC set to  0.000000
5/26/2010	2:54:22 PM	PHl3 MFC set to  0.000000
5/26/2010	2:54:22 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:54:22 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	2:54:22 PM	Tube furnace set to 0
5/26/2010	2:54:37 PM	Helium valve closed
5/26/2010	2:54:37 PM	H2 valve closed
5/26/2010	2:54:37 PM	BCl3 valve closed
5/26/2010	2:54:37 PM	PH3 valve closed
5/26/2010	2:54:37 PM	SiCl4 pre valve closed
5/26/2010	2:54:37 PM	SiCl4 post valve closed
5/26/2010	2:54:37 PM	Main Vac valve closed
5/26/2010	2:54:37 PM	Bubbler valve closed
5/26/2010	2:54:37 PM	Bypass valve opened
5/26/2010	2:54:37 PM	Helium MFC set to  0.000000
5/26/2010	2:54:37 PM	H2 MFC set to  0.000000
5/26/2010	2:54:37 PM	BCl3 MFC set to  0.000000
5/26/2010	2:54:37 PM	PHl3 MFC set to  0.000000
5/26/2010	2:54:37 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:54:37 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	2:54:37 PM	Tube furnace set to 0
5/26/2010	2:55:24 PM	Helium valve closed
5/26/2010	2:55:24 PM	H2 valve closed
5/26/2010	2:55:24 PM	BCl3 valve closed
5/26/2010	2:55:24 PM	PH3 valve closed
5/26/2010	2:55:24 PM	SiCl4 pre valve closed
5/26/2010	2:55:24 PM	SiCl4 post valve closed
5/26/2010	2:55:24 PM	Bubbler valve closed
5/26/2010	2:55:24 PM	Main Vac valve opened
5/26/2010	2:55:24 PM	Bypass valve opened
5/26/2010	2:55:24 PM	Helium MFC set to  0.000000
5/26/2010	2:55:24 PM	H2 MFC set to  0.000000
5/26/2010	2:55:24 PM	BCl3 MFC set to  0.000000
5/26/2010	2:55:24 PM	PHl3 MFC set to  0.000000
5/26/2010	2:55:24 PM	SiCl4 MFC set to  0.000000
5/26/2010	2:55:24 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	2:55:25 PM	Tube furnace set to 0
5/26/2010	3:00:25 PM	H2 valve closed
5/26/2010	3:00:25 PM	BCl3 valve closed
5/26/2010	3:00:25 PM	PH3 valve closed
5/26/2010	3:00:25 PM	SiCl4 pre valve closed
5/26/2010	3:00:25 PM	SiCl4 post valve closed
5/26/2010	3:00:25 PM	Main Vac valve closed
5/26/2010	3:00:25 PM	Bypass valve closed
5/26/2010	3:00:25 PM	Bubbler valve closed
5/26/2010	3:00:25 PM	Helium valve opened
5/26/2010	3:00:25 PM	Helium MFC set to  500.000000
5/26/2010	3:00:25 PM	H2 MFC set to  0.000000
5/26/2010	3:00:25 PM	BCl3 MFC set to  0.000000
5/26/2010	3:00:25 PM	PHl3 MFC set to  0.000000
5/26/2010	3:00:25 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:00:25 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:00:25 PM	Tube furnace set to 0
5/26/2010	3:01:45 PM	Helium valve closed
5/26/2010	3:01:45 PM	H2 valve closed
5/26/2010	3:01:45 PM	BCl3 valve closed
5/26/2010	3:01:45 PM	PH3 valve closed
5/26/2010	3:01:45 PM	SiCl4 pre valve closed
5/26/2010	3:01:45 PM	SiCl4 post valve closed
5/26/2010	3:01:45 PM	Main Vac valve closed
5/26/2010	3:01:45 PM	Bypass valve closed
5/26/2010	3:01:45 PM	Bubbler valve closed
5/26/2010	3:01:45 PM	Helium MFC set to  0.000000
5/26/2010	3:01:45 PM	H2 MFC set to  0.000000
5/26/2010	3:01:45 PM	BCl3 MFC set to  0.000000
5/26/2010	3:01:45 PM	PHl3 MFC set to  0.000000
5/26/2010	3:01:45 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:01:45 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:01:45 PM	Tube furnace set to 0
5/26/2010	3:02:00 PM	Helium valve closed
5/26/2010	3:02:00 PM	H2 valve closed
5/26/2010	3:02:00 PM	BCl3 valve closed
5/26/2010	3:02:00 PM	PH3 valve closed
5/26/2010	3:02:00 PM	SiCl4 pre valve closed
5/26/2010	3:02:00 PM	SiCl4 post valve closed
5/26/2010	3:02:00 PM	Main Vac valve closed
5/26/2010	3:02:00 PM	Bubbler valve closed
5/26/2010	3:02:00 PM	Bypass valve opened
5/26/2010	3:02:00 PM	Helium MFC set to  0.000000
5/26/2010	3:02:00 PM	H2 MFC set to  0.000000
5/26/2010	3:02:01 PM	BCl3 MFC set to  0.000000
5/26/2010	3:02:01 PM	PHl3 MFC set to  0.000000
5/26/2010	3:02:01 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:02:01 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:02:01 PM	Tube furnace set to 0
5/26/2010	3:02:33 PM	Helium valve closed
5/26/2010	3:02:33 PM	H2 valve closed
5/26/2010	3:02:33 PM	BCl3 valve closed
5/26/2010	3:02:33 PM	PH3 valve closed
5/26/2010	3:02:33 PM	SiCl4 pre valve closed
5/26/2010	3:02:33 PM	SiCl4 post valve closed
5/26/2010	3:02:33 PM	Bubbler valve closed
5/26/2010	3:02:33 PM	Main Vac valve opened
5/26/2010	3:02:33 PM	Bypass valve opened
5/26/2010	3:02:33 PM	Helium MFC set to  0.000000
5/26/2010	3:02:33 PM	H2 MFC set to  0.000000
5/26/2010	3:02:33 PM	BCl3 MFC set to  0.000000
5/26/2010	3:02:33 PM	PHl3 MFC set to  0.000000
5/26/2010	3:02:33 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:02:33 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:02:33 PM	Tube furnace set to 0
5/26/2010	3:07:33 PM	H2 valve closed
5/26/2010	3:07:33 PM	BCl3 valve closed
5/26/2010	3:07:33 PM	PH3 valve closed
5/26/2010	3:07:33 PM	SiCl4 pre valve closed
5/26/2010	3:07:33 PM	SiCl4 post valve closed
5/26/2010	3:07:33 PM	Main Vac valve closed
5/26/2010	3:07:33 PM	Bypass valve closed
5/26/2010	3:07:33 PM	Bubbler valve closed
5/26/2010	3:07:33 PM	Helium valve opened
5/26/2010	3:07:33 PM	Helium MFC set to  500.000000
5/26/2010	3:07:33 PM	H2 MFC set to  0.000000
5/26/2010	3:07:33 PM	BCl3 MFC set to  0.000000
5/26/2010	3:07:33 PM	PHl3 MFC set to  0.000000
5/26/2010	3:07:33 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:07:33 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:07:34 PM	Tube furnace set to 0
5/26/2010	3:08:54 PM	Helium valve closed
5/26/2010	3:08:54 PM	H2 valve closed
5/26/2010	3:08:54 PM	BCl3 valve closed
5/26/2010	3:08:54 PM	PH3 valve closed
5/26/2010	3:08:54 PM	SiCl4 pre valve closed
5/26/2010	3:08:54 PM	SiCl4 post valve closed
5/26/2010	3:08:54 PM	Main Vac valve closed
5/26/2010	3:08:54 PM	Bypass valve closed
5/26/2010	3:08:54 PM	Bubbler valve closed
5/26/2010	3:08:54 PM	Helium MFC set to  0.000000
5/26/2010	3:08:54 PM	H2 MFC set to  0.000000
5/26/2010	3:08:54 PM	BCl3 MFC set to  0.000000
5/26/2010	3:08:54 PM	PHl3 MFC set to  0.000000
5/26/2010	3:08:54 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:08:54 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:08:54 PM	Tube furnace set to 0
5/26/2010	3:09:09 PM	Helium valve closed
5/26/2010	3:09:09 PM	H2 valve closed
5/26/2010	3:09:09 PM	BCl3 valve closed
5/26/2010	3:09:09 PM	PH3 valve closed
5/26/2010	3:09:09 PM	SiCl4 pre valve closed
5/26/2010	3:09:09 PM	SiCl4 post valve closed
5/26/2010	3:09:09 PM	Main Vac valve closed
5/26/2010	3:09:09 PM	Bubbler valve closed
5/26/2010	3:09:09 PM	Bypass valve opened
5/26/2010	3:09:09 PM	Helium MFC set to  0.000000
5/26/2010	3:09:09 PM	H2 MFC set to  0.000000
5/26/2010	3:09:09 PM	BCl3 MFC set to  0.000000
5/26/2010	3:09:09 PM	PHl3 MFC set to  0.000000
5/26/2010	3:09:09 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:09:09 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:09:09 PM	Tube furnace set to 0
5/26/2010	3:09:41 PM	Helium valve closed
5/26/2010	3:09:41 PM	H2 valve closed
5/26/2010	3:09:41 PM	BCl3 valve closed
5/26/2010	3:09:41 PM	PH3 valve closed
5/26/2010	3:09:41 PM	SiCl4 pre valve closed
5/26/2010	3:09:41 PM	SiCl4 post valve closed
5/26/2010	3:09:41 PM	Bubbler valve closed
5/26/2010	3:09:41 PM	Main Vac valve opened
5/26/2010	3:09:41 PM	Bypass valve opened
5/26/2010	3:09:41 PM	Helium MFC set to  0.000000
5/26/2010	3:09:41 PM	H2 MFC set to  0.000000
5/26/2010	3:09:41 PM	BCl3 MFC set to  0.000000
5/26/2010	3:09:41 PM	PHl3 MFC set to  0.000000
5/26/2010	3:09:41 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:09:41 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:09:41 PM	Tube furnace set to 0
5/26/2010	3:14:41 PM	Helium valve closed
5/26/2010	3:14:41 PM	H2 valve closed
5/26/2010	3:14:41 PM	BCl3 valve closed
5/26/2010	3:14:41 PM	PH3 valve closed
5/26/2010	3:14:41 PM	SiCl4 pre valve closed
5/26/2010	3:14:41 PM	SiCl4 post valve closed
5/26/2010	3:14:41 PM	Bubbler valve closed
5/26/2010	3:14:41 PM	Main Vac valve opened
5/26/2010	3:14:41 PM	Bypass valve opened
5/26/2010	3:14:41 PM	Helium MFC set to  0.000000
5/26/2010	3:14:41 PM	H2 MFC set to  0.000000
5/26/2010	3:14:41 PM	BCl3 MFC set to  0.000000
5/26/2010	3:14:41 PM	PHl3 MFC set to  0.000000
5/26/2010	3:14:41 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:14:41 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:14:41 PM	Tube furnace set to 0
5/26/2010	3:14:42 PM	Run finished at 3:14 PM
5/26/2010	3:14:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	3:28:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	3:28:12 PM	Recipe started at 3:28 PM
5/26/2010	3:28:12 PM	H2 valve closed
5/26/2010	3:28:12 PM	BCl3 valve closed
5/26/2010	3:28:12 PM	PH3 valve closed
5/26/2010	3:28:12 PM	SiCl4 pre valve closed
5/26/2010	3:28:12 PM	SiCl4 post valve closed
5/26/2010	3:28:12 PM	Main Vac valve closed
5/26/2010	3:28:12 PM	Bypass valve closed
5/26/2010	3:28:12 PM	Bubbler valve closed
5/26/2010	3:28:12 PM	Helium valve opened
5/26/2010	3:28:12 PM	Helium MFC set to  500.000000
5/26/2010	3:28:12 PM	H2 MFC set to  0.000000
5/26/2010	3:28:12 PM	BCl3 MFC set to  0.000000
5/26/2010	3:28:12 PM	PHl3 MFC set to  0.000000
5/26/2010	3:28:12 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:28:12 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:28:12 PM	Tube furnace set to 0
5/26/2010	3:29:32 PM	Helium valve closed
5/26/2010	3:29:32 PM	H2 valve closed
5/26/2010	3:29:32 PM	BCl3 valve closed
5/26/2010	3:29:32 PM	PH3 valve closed
5/26/2010	3:29:32 PM	SiCl4 pre valve closed
5/26/2010	3:29:32 PM	SiCl4 post valve closed
5/26/2010	3:29:32 PM	Main Vac valve closed
5/26/2010	3:29:32 PM	Bypass valve closed
5/26/2010	3:29:32 PM	Bubbler valve closed
5/26/2010	3:29:32 PM	Helium MFC set to  0.000000
5/26/2010	3:29:32 PM	H2 MFC set to  0.000000
5/26/2010	3:29:32 PM	BCl3 MFC set to  0.000000
5/26/2010	3:29:32 PM	PHl3 MFC set to  0.000000
5/26/2010	3:29:32 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:29:32 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:29:32 PM	Tube furnace set to 0
5/26/2010	3:29:47 PM	Helium valve closed
5/26/2010	3:29:47 PM	H2 valve closed
5/26/2010	3:29:47 PM	BCl3 valve closed
5/26/2010	3:29:47 PM	PH3 valve closed
5/26/2010	3:29:47 PM	SiCl4 pre valve closed
5/26/2010	3:29:47 PM	SiCl4 post valve closed
5/26/2010	3:29:47 PM	Main Vac valve closed
5/26/2010	3:29:47 PM	Bubbler valve closed
5/26/2010	3:29:47 PM	Bypass valve opened
5/26/2010	3:29:47 PM	Helium MFC set to  0.000000
5/26/2010	3:29:47 PM	H2 MFC set to  0.000000
5/26/2010	3:29:47 PM	BCl3 MFC set to  0.000000
5/26/2010	3:29:47 PM	PHl3 MFC set to  0.000000
5/26/2010	3:29:47 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:29:47 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:29:47 PM	Tube furnace set to 0
5/26/2010	3:30:19 PM	Helium valve closed
5/26/2010	3:30:19 PM	H2 valve closed
5/26/2010	3:30:19 PM	BCl3 valve closed
5/26/2010	3:30:19 PM	PH3 valve closed
5/26/2010	3:30:19 PM	SiCl4 pre valve closed
5/26/2010	3:30:19 PM	SiCl4 post valve closed
5/26/2010	3:30:19 PM	Bubbler valve closed
5/26/2010	3:30:19 PM	Main Vac valve opened
5/26/2010	3:30:19 PM	Bypass valve opened
5/26/2010	3:30:19 PM	Helium MFC set to  0.000000
5/26/2010	3:30:19 PM	H2 MFC set to  0.000000
5/26/2010	3:30:19 PM	BCl3 MFC set to  0.000000
5/26/2010	3:30:19 PM	PHl3 MFC set to  0.000000
5/26/2010	3:30:19 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:30:19 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:30:20 PM	Tube furnace set to 0
5/26/2010	3:35:20 PM	H2 valve closed
5/26/2010	3:35:20 PM	BCl3 valve closed
5/26/2010	3:35:20 PM	PH3 valve closed
5/26/2010	3:35:20 PM	SiCl4 pre valve closed
5/26/2010	3:35:20 PM	SiCl4 post valve closed
5/26/2010	3:35:20 PM	Main Vac valve closed
5/26/2010	3:35:20 PM	Bypass valve closed
5/26/2010	3:35:20 PM	Bubbler valve closed
5/26/2010	3:35:20 PM	Helium valve opened
5/26/2010	3:35:20 PM	Helium MFC set to  500.000000
5/26/2010	3:35:20 PM	H2 MFC set to  0.000000
5/26/2010	3:35:20 PM	BCl3 MFC set to  0.000000
5/26/2010	3:35:20 PM	PHl3 MFC set to  0.000000
5/26/2010	3:35:20 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:35:20 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:35:20 PM	Tube furnace set to 0
5/26/2010	3:36:40 PM	Helium valve closed
5/26/2010	3:36:40 PM	H2 valve closed
5/26/2010	3:36:40 PM	BCl3 valve closed
5/26/2010	3:36:40 PM	PH3 valve closed
5/26/2010	3:36:40 PM	SiCl4 pre valve closed
5/26/2010	3:36:40 PM	SiCl4 post valve closed
5/26/2010	3:36:40 PM	Main Vac valve closed
5/26/2010	3:36:40 PM	Bypass valve closed
5/26/2010	3:36:40 PM	Bubbler valve closed
5/26/2010	3:36:40 PM	Helium MFC set to  0.000000
5/26/2010	3:36:40 PM	H2 MFC set to  0.000000
5/26/2010	3:36:40 PM	BCl3 MFC set to  0.000000
5/26/2010	3:36:40 PM	PHl3 MFC set to  0.000000
5/26/2010	3:36:40 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:36:40 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:36:40 PM	Tube furnace set to 0
5/26/2010	3:36:55 PM	Helium valve closed
5/26/2010	3:36:55 PM	H2 valve closed
5/26/2010	3:36:55 PM	BCl3 valve closed
5/26/2010	3:36:55 PM	PH3 valve closed
5/26/2010	3:36:55 PM	SiCl4 pre valve closed
5/26/2010	3:36:55 PM	SiCl4 post valve closed
5/26/2010	3:36:55 PM	Main Vac valve closed
5/26/2010	3:36:55 PM	Bubbler valve closed
5/26/2010	3:36:55 PM	Bypass valve opened
5/26/2010	3:36:55 PM	Helium MFC set to  0.000000
5/26/2010	3:36:55 PM	H2 MFC set to  0.000000
5/26/2010	3:36:55 PM	BCl3 MFC set to  0.000000
5/26/2010	3:36:55 PM	PHl3 MFC set to  0.000000
5/26/2010	3:36:55 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:36:55 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:36:55 PM	Tube furnace set to 0
5/26/2010	3:37:27 PM	Helium valve closed
5/26/2010	3:37:27 PM	H2 valve closed
5/26/2010	3:37:27 PM	BCl3 valve closed
5/26/2010	3:37:27 PM	PH3 valve closed
5/26/2010	3:37:27 PM	SiCl4 pre valve closed
5/26/2010	3:37:27 PM	SiCl4 post valve closed
5/26/2010	3:37:27 PM	Bubbler valve closed
5/26/2010	3:37:27 PM	Main Vac valve opened
5/26/2010	3:37:27 PM	Bypass valve opened
5/26/2010	3:37:27 PM	Helium MFC set to  0.000000
5/26/2010	3:37:27 PM	H2 MFC set to  0.000000
5/26/2010	3:37:27 PM	BCl3 MFC set to  0.000000
5/26/2010	3:37:27 PM	PHl3 MFC set to  0.000000
5/26/2010	3:37:27 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:37:27 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:37:27 PM	Tube furnace set to 0
5/26/2010	3:42:27 PM	H2 valve closed
5/26/2010	3:42:27 PM	BCl3 valve closed
5/26/2010	3:42:27 PM	PH3 valve closed
5/26/2010	3:42:27 PM	SiCl4 pre valve closed
5/26/2010	3:42:27 PM	SiCl4 post valve closed
5/26/2010	3:42:27 PM	Main Vac valve closed
5/26/2010	3:42:27 PM	Bypass valve closed
5/26/2010	3:42:27 PM	Bubbler valve closed
5/26/2010	3:42:27 PM	Helium valve opened
5/26/2010	3:42:27 PM	Helium MFC set to  500.000000
5/26/2010	3:42:27 PM	H2 MFC set to  0.000000
5/26/2010	3:42:27 PM	BCl3 MFC set to  0.000000
5/26/2010	3:42:27 PM	PHl3 MFC set to  0.000000
5/26/2010	3:42:27 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:42:27 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:42:27 PM	Tube furnace set to 0
5/26/2010	3:43:47 PM	Helium valve closed
5/26/2010	3:43:47 PM	H2 valve closed
5/26/2010	3:43:47 PM	BCl3 valve closed
5/26/2010	3:43:47 PM	PH3 valve closed
5/26/2010	3:43:47 PM	SiCl4 pre valve closed
5/26/2010	3:43:47 PM	SiCl4 post valve closed
5/26/2010	3:43:47 PM	Main Vac valve closed
5/26/2010	3:43:47 PM	Bypass valve closed
5/26/2010	3:43:47 PM	Bubbler valve closed
5/26/2010	3:43:47 PM	Helium MFC set to  0.000000
5/26/2010	3:43:47 PM	H2 MFC set to  0.000000
5/26/2010	3:43:47 PM	BCl3 MFC set to  0.000000
5/26/2010	3:43:47 PM	PHl3 MFC set to  0.000000
5/26/2010	3:43:47 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:43:47 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:43:47 PM	Tube furnace set to 0
5/26/2010	3:44:02 PM	Helium valve closed
5/26/2010	3:44:02 PM	H2 valve closed
5/26/2010	3:44:02 PM	BCl3 valve closed
5/26/2010	3:44:02 PM	PH3 valve closed
5/26/2010	3:44:02 PM	SiCl4 pre valve closed
5/26/2010	3:44:02 PM	SiCl4 post valve closed
5/26/2010	3:44:02 PM	Main Vac valve closed
5/26/2010	3:44:02 PM	Bubbler valve closed
5/26/2010	3:44:02 PM	Bypass valve opened
5/26/2010	3:44:02 PM	Helium MFC set to  0.000000
5/26/2010	3:44:02 PM	H2 MFC set to  0.000000
5/26/2010	3:44:02 PM	BCl3 MFC set to  0.000000
5/26/2010	3:44:02 PM	PHl3 MFC set to  0.000000
5/26/2010	3:44:02 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:44:02 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:44:02 PM	Tube furnace set to 0
5/26/2010	3:44:34 PM	Helium valve closed
5/26/2010	3:44:34 PM	H2 valve closed
5/26/2010	3:44:34 PM	BCl3 valve closed
5/26/2010	3:44:34 PM	PH3 valve closed
5/26/2010	3:44:34 PM	SiCl4 pre valve closed
5/26/2010	3:44:34 PM	SiCl4 post valve closed
5/26/2010	3:44:34 PM	Bubbler valve closed
5/26/2010	3:44:34 PM	Main Vac valve opened
5/26/2010	3:44:34 PM	Bypass valve opened
5/26/2010	3:44:34 PM	Helium MFC set to  0.000000
5/26/2010	3:44:34 PM	H2 MFC set to  0.000000
5/26/2010	3:44:34 PM	BCl3 MFC set to  0.000000
5/26/2010	3:44:34 PM	PHl3 MFC set to  0.000000
5/26/2010	3:44:34 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:44:34 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:44:35 PM	Tube furnace set to 0
5/26/2010	3:49:35 PM	Helium valve closed
5/26/2010	3:49:35 PM	H2 valve closed
5/26/2010	3:49:35 PM	BCl3 valve closed
5/26/2010	3:49:35 PM	PH3 valve closed
5/26/2010	3:49:35 PM	SiCl4 pre valve closed
5/26/2010	3:49:35 PM	SiCl4 post valve closed
5/26/2010	3:49:35 PM	Bubbler valve closed
5/26/2010	3:49:35 PM	Main Vac valve opened
5/26/2010	3:49:35 PM	Bypass valve opened
5/26/2010	3:49:35 PM	Helium MFC set to  0.000000
5/26/2010	3:49:35 PM	H2 MFC set to  0.000000
5/26/2010	3:49:35 PM	BCl3 MFC set to  0.000000
5/26/2010	3:49:35 PM	PHl3 MFC set to  0.000000
5/26/2010	3:49:35 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:49:35 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:49:35 PM	Tube furnace set to 0
5/26/2010	3:49:36 PM	Run finished at 3:49 PM
5/26/2010	3:49:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	3:49:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	3:49:52 PM	Recipe started at 3:49 PM
5/26/2010	3:49:52 PM	Helium valve closed
5/26/2010	3:49:52 PM	H2 valve closed
5/26/2010	3:49:52 PM	BCl3 valve closed
5/26/2010	3:49:52 PM	PH3 valve closed
5/26/2010	3:49:52 PM	SiCl4 pre valve closed
5/26/2010	3:49:52 PM	SiCl4 post valve closed
5/26/2010	3:49:52 PM	Main Vac valve closed
5/26/2010	3:49:52 PM	Bypass valve closed
5/26/2010	3:49:52 PM	Bubbler valve closed
5/26/2010	3:49:52 PM	Helium MFC set to  0.000000
5/26/2010	3:49:52 PM	H2 MFC set to  0.000000
5/26/2010	3:49:52 PM	BCl3 MFC set to  0.000000
5/26/2010	3:49:52 PM	PHl3 MFC set to  0.000000
5/26/2010	3:49:52 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:49:52 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:49:52 PM	Tube furnace set to 0
5/26/2010	3:49:53 PM	Run finished at 3:49 PM
5/26/2010	3:49:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	3:51:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2010	3:51:08 PM	Recipe started at 3:51 PM
5/26/2010	3:51:08 PM	Helium valve closed
5/26/2010	3:51:08 PM	H2 valve closed
5/26/2010	3:51:08 PM	BCl3 valve closed
5/26/2010	3:51:08 PM	PH3 valve closed
5/26/2010	3:51:08 PM	SiCl4 pre valve closed
5/26/2010	3:51:08 PM	SiCl4 post valve closed
5/26/2010	3:51:08 PM	Main Vac valve closed
5/26/2010	3:51:08 PM	Bubbler valve closed
5/26/2010	3:51:08 PM	Bypass valve opened
5/26/2010	3:51:08 PM	Helium MFC set to  0.000000
5/26/2010	3:51:08 PM	H2 MFC set to  0.000000
5/26/2010	3:51:08 PM	BCl3 MFC set to  0.000000
5/26/2010	3:51:08 PM	PHl3 MFC set to  0.000000
5/26/2010	3:51:08 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:51:08 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:51:08 PM	Tube furnace set to 0
5/26/2010	3:51:08 PM	Helium valve closed
5/26/2010	3:51:08 PM	H2 valve closed
5/26/2010	3:51:08 PM	BCl3 valve closed
5/26/2010	3:51:08 PM	PH3 valve closed
5/26/2010	3:51:08 PM	SiCl4 pre valve closed
5/26/2010	3:51:08 PM	SiCl4 post valve closed
5/26/2010	3:51:08 PM	Bubbler valve closed
5/26/2010	3:51:08 PM	Main Vac valve opened
5/26/2010	3:51:08 PM	Bypass valve opened
5/26/2010	3:51:08 PM	Helium MFC set to  0.000000
5/26/2010	3:51:08 PM	H2 MFC set to  0.000000
5/26/2010	3:51:09 PM	BCl3 MFC set to  0.000000
5/26/2010	3:51:09 PM	PHl3 MFC set to  0.000000
5/26/2010	3:51:09 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:51:09 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:51:09 PM	Tube furnace set to 0
5/26/2010	3:51:09 PM	Run finished at 3:51 PM
5/26/2010	3:51:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2010	3:53:57 PM	Recipe started at 3:53 PM
5/26/2010	3:53:57 PM	Helium valve closed
5/26/2010	3:53:57 PM	BCl3 valve closed
5/26/2010	3:53:57 PM	PH3 valve closed
5/26/2010	3:53:57 PM	SiCl4 pre valve closed
5/26/2010	3:53:57 PM	SiCl4 post valve closed
5/26/2010	3:53:57 PM	Main Vac valve closed
5/26/2010	3:53:57 PM	Bypass valve closed
5/26/2010	3:53:57 PM	Bubbler valve closed
5/26/2010	3:53:57 PM	H2 valve opened
5/26/2010	3:53:57 PM	Helium MFC set to  0.000000
5/26/2010	3:53:57 PM	H2 MFC set to  500.000000
5/26/2010	3:53:57 PM	BCl3 MFC set to  0.000000
5/26/2010	3:53:57 PM	PHl3 MFC set to  0.000000
5/26/2010	3:53:57 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:53:57 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:53:57 PM	Tube furnace set to 1000
5/26/2010	3:55:18 PM	Helium valve closed
5/26/2010	3:55:18 PM	BCl3 valve closed
5/26/2010	3:55:18 PM	PH3 valve closed
5/26/2010	3:55:18 PM	SiCl4 pre valve closed
5/26/2010	3:55:18 PM	SiCl4 post valve closed
5/26/2010	3:55:18 PM	Main Vac valve closed
5/26/2010	3:55:18 PM	Bypass valve closed
5/26/2010	3:55:18 PM	H2 valve opened
5/26/2010	3:55:18 PM	Bubbler valve opened
5/26/2010	3:55:18 PM	Helium MFC set to  0.000000
5/26/2010	3:55:18 PM	H2 MFC set to  500.000000
5/26/2010	3:55:18 PM	BCl3 MFC set to  0.000000
5/26/2010	3:55:18 PM	PHl3 MFC set to  0.000000
5/26/2010	3:55:18 PM	SiCl4 MFC set to  0.000000
5/26/2010	3:55:18 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	3:55:18 PM	Tube furnace set to 1000
5/26/2010	4:15:18 PM	Helium valve closed
5/26/2010	4:15:18 PM	There was an error trying to close the PH3 valve.  It remains opened. 
5/26/2010	4:17:49 PM	Main Vac valve closed
5/26/2010	4:17:49 PM	Bypass valve closed
5/26/2010	4:17:49 PM	H2 valve opened
5/26/2010	4:17:49 PM	BCl3 valve opened
5/26/2010	4:17:49 PM	SiCl4 pre valve opened
5/26/2010	4:17:49 PM	SiCl4 post valve opened
5/26/2010	4:17:49 PM	Bubbler valve opened
5/26/2010	4:17:49 PM	Helium MFC set to  0.000000
5/26/2010	4:17:49 PM	H2 MFC set to  500.000000
5/26/2010	4:17:49 PM	BCl3 MFC set to  35.000000
5/26/2010	4:17:49 PM	Error setting the  PHl3 MFC to 0.000000
5/26/2010	4:17:58 PM	Error setting the  SiCl4 MFC to 50.000000
5/26/2010	4:17:59 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	4:17:59 PM	Tube furnace set to 1000
5/26/2010	4:18:01 PM	Run aborted at 4:18 PM
5/26/2010	4:18:01 PM	Helium valve closed
5/26/2010	4:18:01 PM	H2 valve closed
5/26/2010	4:18:01 PM	BCl3 valve closed
5/26/2010	4:18:01 PM	There was an error trying to close the PH3 valve.  It remains opened. 
5/26/2010	4:21:16 PM	SiCl4 pre valve closed
5/26/2010	4:21:16 PM	SiCl4 post valve closed
5/26/2010	4:21:16 PM	Bypass valve closed
5/26/2010	4:21:16 PM	Main Vac valve closed
5/26/2010	4:21:16 PM	Bubbler valve closed
5/26/2010	4:21:16 PM	Helium MFC set to  0.000000
5/26/2010	4:21:16 PM	H2 MFC set to  0.000000
5/26/2010	4:21:16 PM	BCl3 MFC set to  0.000000
5/26/2010	4:21:16 PM	Error setting the  PHl3 MFC to 0.000000
5/26/2010	4:21:25 PM	Error setting the  SiCl4 MFC to 0.000000
5/26/2010	4:21:27 PM	Tube furnace set to 0
5/26/2010	4:22:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	4:22:51 PM	Recipe started at 4:22 PM
5/26/2010	4:22:51 PM	Helium valve closed
5/26/2010	4:22:51 PM	H2 valve closed
5/26/2010	4:22:51 PM	BCl3 valve closed
5/26/2010	4:22:51 PM	There was an error trying to close the PH3 valve.  It remains opened. 
5/26/2010	4:22:56 PM	SiCl4 pre valve closed
5/26/2010	4:22:56 PM	SiCl4 post valve closed
5/26/2010	4:22:56 PM	Main Vac valve closed
5/26/2010	4:22:56 PM	Bypass valve closed
5/26/2010	4:22:56 PM	Bubbler valve closed
5/26/2010	4:22:56 PM	Helium MFC set to  0.000000
5/26/2010	4:22:56 PM	H2 MFC set to  0.000000
5/26/2010	4:22:56 PM	BCl3 MFC set to  0.000000
5/26/2010	4:22:56 PM	Error setting the  PHl3 MFC to 0.000000
5/26/2010	4:23:11 PM	Error setting the  SiCl4 MFC to 0.000000
5/26/2010	4:23:12 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	4:23:12 PM	Tube furnace set to 0
5/26/2010	4:23:12 PM	Run finished at 4:23 PM
5/26/2010	4:23:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	4:59:33 PM	Program exited cleanly
5/26/2010	5:02:35 PM	Program started normally
5/26/2010	5:02:36 PM	Helium valve closed
5/26/2010	5:02:36 PM	H2 valve closed
5/26/2010	5:02:36 PM	BCl3 valve closed
5/26/2010	5:02:36 PM	PH3 valve closed
5/26/2010	5:02:36 PM	SiCl4 pre valve closed
5/26/2010	5:02:36 PM	SiCl4 post valve closed
5/26/2010	5:02:36 PM	Main Vac valve closed
5/26/2010	5:02:36 PM	Bypass valve closed
5/26/2010	5:02:36 PM	Bubbler valve closed
5/26/2010	5:02:36 PM	Helium MFC set to  0.000000
5/26/2010	5:02:36 PM	H2 MFC set to  0.000000
5/26/2010	5:02:36 PM	BCl3 MFC set to  0.000000
5/26/2010	5:02:36 PM	PHl3 MFC set to  0.000000
5/26/2010	5:02:36 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:02:36 PM	Bypass solenoid MFC set to  760.000000
5/26/2010	5:02:37 PM	Tube furnace set to 0
5/26/2010	5:02:47 PM	Helium MFC set to  500.000000
5/26/2010	5:02:51 PM	Helium valve opened
5/26/2010	5:02:57 PM	Bubbler valve opened
5/26/2010	5:14:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	5:14:07 PM	Recipe started at 5:14 PM
5/26/2010	5:14:07 PM	Helium valve closed
5/26/2010	5:14:07 PM	H2 valve closed
5/26/2010	5:14:07 PM	BCl3 valve closed
5/26/2010	5:14:07 PM	PH3 valve closed
5/26/2010	5:14:07 PM	SiCl4 pre valve closed
5/26/2010	5:14:07 PM	SiCl4 post valve closed
5/26/2010	5:14:07 PM	Main Vac valve closed
5/26/2010	5:14:07 PM	Bypass valve closed
5/26/2010	5:14:07 PM	Bubbler valve closed
5/26/2010	5:14:07 PM	Helium MFC set to  0.000000
5/26/2010	5:14:07 PM	H2 MFC set to  0.000000
5/26/2010	5:14:07 PM	BCl3 MFC set to  0.000000
5/26/2010	5:14:07 PM	PHl3 MFC set to  0.000000
5/26/2010	5:14:07 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:14:07 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:14:07 PM	Tube furnace set to 0
5/26/2010	5:14:07 PM	Run finished at 5:14 PM
5/26/2010	5:14:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2010	5:32:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	5:32:19 PM	Recipe started at 5:32 PM
5/26/2010	5:32:19 PM	H2 valve closed
5/26/2010	5:32:19 PM	BCl3 valve closed
5/26/2010	5:32:19 PM	PH3 valve closed
5/26/2010	5:32:19 PM	SiCl4 pre valve closed
5/26/2010	5:32:19 PM	SiCl4 post valve closed
5/26/2010	5:32:19 PM	Main Vac valve closed
5/26/2010	5:32:19 PM	Bypass valve closed
5/26/2010	5:32:19 PM	Bubbler valve closed
5/26/2010	5:32:19 PM	Helium valve opened
5/26/2010	5:32:19 PM	Helium MFC set to  500.000000
5/26/2010	5:32:19 PM	H2 MFC set to  0.000000
5/26/2010	5:32:19 PM	BCl3 MFC set to  0.000000
5/26/2010	5:32:19 PM	PHl3 MFC set to  0.000000
5/26/2010	5:32:19 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:32:19 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:32:20 PM	Tube furnace set to 0
5/26/2010	5:32:22 PM	Helium valve closed
5/26/2010	5:32:22 PM	H2 valve closed
5/26/2010	5:32:22 PM	BCl3 valve closed
5/26/2010	5:32:22 PM	PH3 valve closed
5/26/2010	5:32:22 PM	SiCl4 pre valve closed
5/26/2010	5:32:22 PM	SiCl4 post valve closed
5/26/2010	5:32:22 PM	Main Vac valve closed
5/26/2010	5:32:22 PM	Bypass valve closed
5/26/2010	5:32:22 PM	Bubbler valve closed
5/26/2010	5:32:22 PM	Helium MFC set to  0.000000
5/26/2010	5:32:22 PM	H2 MFC set to  0.000000
5/26/2010	5:32:22 PM	BCl3 MFC set to  0.000000
5/26/2010	5:32:22 PM	PHl3 MFC set to  0.000000
5/26/2010	5:32:22 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:32:22 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:32:22 PM	Tube furnace set to 0
5/26/2010	5:32:37 PM	Helium valve closed
5/26/2010	5:32:37 PM	H2 valve closed
5/26/2010	5:32:37 PM	BCl3 valve closed
5/26/2010	5:32:37 PM	PH3 valve closed
5/26/2010	5:32:37 PM	SiCl4 pre valve closed
5/26/2010	5:32:37 PM	SiCl4 post valve closed
5/26/2010	5:32:37 PM	Main Vac valve closed
5/26/2010	5:32:37 PM	Bubbler valve closed
5/26/2010	5:32:37 PM	Bypass valve opened
5/26/2010	5:32:37 PM	Helium MFC set to  0.000000
5/26/2010	5:32:37 PM	H2 MFC set to  0.000000
5/26/2010	5:32:37 PM	BCl3 MFC set to  0.000000
5/26/2010	5:32:37 PM	PHl3 MFC set to  0.000000
5/26/2010	5:32:37 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:32:37 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:32:37 PM	Tube furnace set to 0
5/26/2010	5:33:24 PM	Helium valve closed
5/26/2010	5:33:24 PM	H2 valve closed
5/26/2010	5:33:24 PM	BCl3 valve closed
5/26/2010	5:33:24 PM	PH3 valve closed
5/26/2010	5:33:24 PM	SiCl4 pre valve closed
5/26/2010	5:33:24 PM	SiCl4 post valve closed
5/26/2010	5:33:24 PM	Bubbler valve closed
5/26/2010	5:33:24 PM	Main Vac valve opened
5/26/2010	5:33:24 PM	Bypass valve opened
5/26/2010	5:33:24 PM	Helium MFC set to  0.000000
5/26/2010	5:33:24 PM	H2 MFC set to  0.000000
5/26/2010	5:33:24 PM	BCl3 MFC set to  0.000000
5/26/2010	5:33:24 PM	PHl3 MFC set to  0.000000
5/26/2010	5:33:24 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:33:24 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:33:24 PM	Tube furnace set to 0
5/26/2010	5:38:24 PM	H2 valve closed
5/26/2010	5:38:24 PM	BCl3 valve closed
5/26/2010	5:38:24 PM	PH3 valve closed
5/26/2010	5:38:24 PM	SiCl4 pre valve closed
5/26/2010	5:38:24 PM	SiCl4 post valve closed
5/26/2010	5:38:24 PM	Main Vac valve closed
5/26/2010	5:38:24 PM	Bypass valve closed
5/26/2010	5:38:24 PM	Bubbler valve closed
5/26/2010	5:38:24 PM	Helium valve opened
5/26/2010	5:38:24 PM	Helium MFC set to  500.000000
5/26/2010	5:38:24 PM	H2 MFC set to  0.000000
5/26/2010	5:38:24 PM	BCl3 MFC set to  0.000000
5/26/2010	5:38:24 PM	PHl3 MFC set to  0.000000
5/26/2010	5:38:24 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:38:24 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:38:24 PM	Tube furnace set to 0
5/26/2010	5:39:43 PM	Helium valve closed
5/26/2010	5:39:43 PM	H2 valve closed
5/26/2010	5:39:43 PM	BCl3 valve closed
5/26/2010	5:39:43 PM	PH3 valve closed
5/26/2010	5:39:43 PM	SiCl4 pre valve closed
5/26/2010	5:39:43 PM	SiCl4 post valve closed
5/26/2010	5:39:43 PM	Main Vac valve closed
5/26/2010	5:39:43 PM	Bypass valve closed
5/26/2010	5:39:43 PM	Bubbler valve closed
5/26/2010	5:39:43 PM	Helium MFC set to  0.000000
5/26/2010	5:39:43 PM	H2 MFC set to  0.000000
5/26/2010	5:39:43 PM	BCl3 MFC set to  0.000000
5/26/2010	5:39:43 PM	PHl3 MFC set to  0.000000
5/26/2010	5:39:43 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:39:43 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:39:43 PM	Tube furnace set to 0
5/26/2010	5:39:59 PM	Helium valve closed
5/26/2010	5:39:59 PM	H2 valve closed
5/26/2010	5:39:59 PM	BCl3 valve closed
5/26/2010	5:39:59 PM	PH3 valve closed
5/26/2010	5:39:59 PM	SiCl4 pre valve closed
5/26/2010	5:39:59 PM	SiCl4 post valve closed
5/26/2010	5:39:59 PM	Main Vac valve closed
5/26/2010	5:39:59 PM	Bubbler valve closed
5/26/2010	5:39:59 PM	Bypass valve opened
5/26/2010	5:39:59 PM	Helium MFC set to  0.000000
5/26/2010	5:39:59 PM	H2 MFC set to  0.000000
5/26/2010	5:39:59 PM	BCl3 MFC set to  0.000000
5/26/2010	5:39:59 PM	PHl3 MFC set to  0.000000
5/26/2010	5:39:59 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:39:59 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:39:59 PM	Tube furnace set to 0
5/26/2010	5:40:31 PM	Helium valve closed
5/26/2010	5:40:31 PM	H2 valve closed
5/26/2010	5:40:31 PM	BCl3 valve closed
5/26/2010	5:40:31 PM	PH3 valve closed
5/26/2010	5:40:31 PM	SiCl4 pre valve closed
5/26/2010	5:40:31 PM	SiCl4 post valve closed
5/26/2010	5:40:31 PM	Bubbler valve closed
5/26/2010	5:40:31 PM	Main Vac valve opened
5/26/2010	5:40:31 PM	Bypass valve opened
5/26/2010	5:40:31 PM	Helium MFC set to  0.000000
5/26/2010	5:40:31 PM	H2 MFC set to  0.000000
5/26/2010	5:40:31 PM	BCl3 MFC set to  0.000000
5/26/2010	5:40:31 PM	PHl3 MFC set to  0.000000
5/26/2010	5:40:31 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:40:31 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:40:31 PM	Tube furnace set to 0
5/26/2010	5:45:31 PM	H2 valve closed
5/26/2010	5:45:31 PM	BCl3 valve closed
5/26/2010	5:45:31 PM	PH3 valve closed
5/26/2010	5:45:31 PM	SiCl4 pre valve closed
5/26/2010	5:45:31 PM	SiCl4 post valve closed
5/26/2010	5:45:31 PM	Main Vac valve closed
5/26/2010	5:45:31 PM	Bypass valve closed
5/26/2010	5:45:31 PM	Bubbler valve closed
5/26/2010	5:45:31 PM	Helium valve opened
5/26/2010	5:45:31 PM	Helium MFC set to  500.000000
5/26/2010	5:45:31 PM	H2 MFC set to  0.000000
5/26/2010	5:45:31 PM	BCl3 MFC set to  0.000000
5/26/2010	5:45:31 PM	PHl3 MFC set to  0.000000
5/26/2010	5:45:31 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:45:31 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:45:31 PM	Tube furnace set to 0
5/26/2010	5:46:51 PM	Helium valve closed
5/26/2010	5:46:51 PM	H2 valve closed
5/26/2010	5:46:51 PM	BCl3 valve closed
5/26/2010	5:46:51 PM	PH3 valve closed
5/26/2010	5:46:51 PM	SiCl4 pre valve closed
5/26/2010	5:46:51 PM	SiCl4 post valve closed
5/26/2010	5:46:51 PM	Main Vac valve closed
5/26/2010	5:46:51 PM	Bypass valve closed
5/26/2010	5:46:51 PM	Bubbler valve closed
5/26/2010	5:46:51 PM	Helium MFC set to  0.000000
5/26/2010	5:46:51 PM	H2 MFC set to  0.000000
5/26/2010	5:46:51 PM	BCl3 MFC set to  0.000000
5/26/2010	5:46:51 PM	PHl3 MFC set to  0.000000
5/26/2010	5:46:51 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:46:51 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:46:51 PM	Tube furnace set to 0
5/26/2010	5:47:06 PM	Helium valve closed
5/26/2010	5:47:06 PM	H2 valve closed
5/26/2010	5:47:06 PM	BCl3 valve closed
5/26/2010	5:47:06 PM	PH3 valve closed
5/26/2010	5:47:06 PM	SiCl4 pre valve closed
5/26/2010	5:47:06 PM	SiCl4 post valve closed
5/26/2010	5:47:06 PM	Main Vac valve closed
5/26/2010	5:47:06 PM	Bubbler valve closed
5/26/2010	5:47:06 PM	Bypass valve opened
5/26/2010	5:47:06 PM	Helium MFC set to  0.000000
5/26/2010	5:47:06 PM	H2 MFC set to  0.000000
5/26/2010	5:47:06 PM	BCl3 MFC set to  0.000000
5/26/2010	5:47:06 PM	PHl3 MFC set to  0.000000
5/26/2010	5:47:06 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:47:06 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:47:06 PM	Tube furnace set to 0
5/26/2010	5:47:38 PM	Helium valve closed
5/26/2010	5:47:38 PM	H2 valve closed
5/26/2010	5:47:38 PM	BCl3 valve closed
5/26/2010	5:47:38 PM	PH3 valve closed
5/26/2010	5:47:38 PM	SiCl4 pre valve closed
5/26/2010	5:47:38 PM	SiCl4 post valve closed
5/26/2010	5:47:38 PM	Bubbler valve closed
5/26/2010	5:47:38 PM	Main Vac valve opened
5/26/2010	5:47:38 PM	Bypass valve opened
5/26/2010	5:47:38 PM	Helium MFC set to  0.000000
5/26/2010	5:47:38 PM	H2 MFC set to  0.000000
5/26/2010	5:47:38 PM	BCl3 MFC set to  0.000000
5/26/2010	5:47:38 PM	PHl3 MFC set to  0.000000
5/26/2010	5:47:38 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:47:38 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:47:39 PM	Tube furnace set to 0
5/26/2010	5:49:44 PM	Run aborted at 5:49 PM
5/26/2010	5:49:44 PM	Helium valve closed
5/26/2010	5:49:44 PM	H2 valve closed
5/26/2010	5:49:44 PM	BCl3 valve closed
5/26/2010	5:49:44 PM	PH3 valve closed
5/26/2010	5:49:44 PM	SiCl4 pre valve closed
5/26/2010	5:49:44 PM	SiCl4 post valve closed
5/26/2010	5:49:44 PM	Bypass valve closed
5/26/2010	5:49:44 PM	Main Vac valve closed
5/26/2010	5:49:44 PM	Bubbler valve closed
5/26/2010	5:49:44 PM	Helium MFC set to  0.000000
5/26/2010	5:49:44 PM	H2 MFC set to  0.000000
5/26/2010	5:49:44 PM	BCl3 MFC set to  0.000000
5/26/2010	5:49:44 PM	PHl3 MFC set to  0.000000
5/26/2010	5:49:44 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:49:44 PM	Tube furnace set to 0
5/26/2010	5:49:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/26/2010	5:49:53 PM	Bypass valve closed
5/26/2010	5:49:55 PM	Bypass valve opened
5/26/2010	5:49:56 PM	Main Vac valve closed
5/26/2010	5:49:57 PM	Main Vac valve opened
5/26/2010	5:50:08 PM	Main Vac valve closed
5/26/2010	5:50:11 PM	Helium valve opened
5/26/2010	5:50:12 PM	Helium valve closed
5/26/2010	5:50:18 PM	Helium MFC set to  500.000000
5/26/2010	5:50:19 PM	Helium valve opened
5/26/2010	5:50:33 PM	Main Vac valve opened
5/26/2010	5:50:43 PM	Helium valve closed
5/26/2010	5:50:46 PM	Helium MFC set to  0.000000
5/26/2010	5:51:14 PM	Helium MFC set to  500.000000
5/26/2010	5:51:16 PM	Helium valve opened
5/26/2010	5:51:33 PM	Helium valve closed
5/26/2010	5:52:28 PM	Helium valve opened
5/26/2010	5:53:02 PM	Helium valve closed
5/26/2010	5:53:44 PM	Main Vac valve closed
5/26/2010	5:53:45 PM	Bypass valve closed
5/26/2010	5:54:08 PM	Bypass valve opened
5/26/2010	5:54:09 PM	Main Vac valve opened
5/26/2010	5:56:08 PM	Recipe started at 5:56 PM
5/26/2010	5:56:08 PM	Helium valve closed
5/26/2010	5:56:08 PM	BCl3 valve closed
5/26/2010	5:56:08 PM	PH3 valve closed
5/26/2010	5:56:08 PM	SiCl4 pre valve closed
5/26/2010	5:56:08 PM	SiCl4 post valve closed
5/26/2010	5:56:08 PM	Main Vac valve closed
5/26/2010	5:56:08 PM	Bypass valve closed
5/26/2010	5:56:08 PM	Bubbler valve closed
5/26/2010	5:56:08 PM	H2 valve opened
5/26/2010	5:56:08 PM	Helium MFC set to  0.000000
5/26/2010	5:56:08 PM	H2 MFC set to  500.000000
5/26/2010	5:56:08 PM	BCl3 MFC set to  0.000000
5/26/2010	5:56:08 PM	PHl3 MFC set to  0.000000
5/26/2010	5:56:08 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:56:08 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:56:08 PM	Tube furnace set to 1000
5/26/2010	5:57:26 PM	Helium valve closed
5/26/2010	5:57:26 PM	BCl3 valve closed
5/26/2010	5:57:26 PM	PH3 valve closed
5/26/2010	5:57:27 PM	SiCl4 pre valve closed
5/26/2010	5:57:27 PM	SiCl4 post valve closed
5/26/2010	5:57:27 PM	Main Vac valve closed
5/26/2010	5:57:27 PM	Bypass valve closed
5/26/2010	5:57:27 PM	H2 valve opened
5/26/2010	5:57:27 PM	Bubbler valve opened
5/26/2010	5:57:27 PM	Helium MFC set to  0.000000
5/26/2010	5:57:27 PM	H2 MFC set to  500.000000
5/26/2010	5:57:27 PM	BCl3 MFC set to  0.000000
5/26/2010	5:57:27 PM	PHl3 MFC set to  0.000000
5/26/2010	5:57:27 PM	SiCl4 MFC set to  0.000000
5/26/2010	5:57:27 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	5:57:27 PM	Tube furnace set to 1000
5/26/2010	6:17:27 PM	Helium valve closed
5/26/2010	6:17:27 PM	PH3 valve closed
5/26/2010	6:17:27 PM	Main Vac valve closed
5/26/2010	6:17:27 PM	Bypass valve closed
5/26/2010	6:17:27 PM	H2 valve opened
5/26/2010	6:17:27 PM	BCl3 valve opened
5/26/2010	6:17:27 PM	SiCl4 pre valve opened
5/26/2010	6:17:27 PM	SiCl4 post valve opened
5/26/2010	6:17:27 PM	Bubbler valve opened
5/26/2010	6:17:27 PM	Helium MFC set to  0.000000
5/26/2010	6:17:27 PM	H2 MFC set to  500.000000
5/26/2010	6:17:27 PM	BCl3 MFC set to  35.000000
5/26/2010	6:17:27 PM	PHl3 MFC set to  0.000000
5/26/2010	6:17:27 PM	SiCl4 MFC set to  50.000000
5/26/2010	6:17:27 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	6:17:27 PM	Tube furnace set to 1000
5/26/2010	6:22:27 PM	Helium valve closed
5/26/2010	6:22:27 PM	BCl3 valve closed
5/26/2010	6:22:27 PM	PH3 valve closed
5/26/2010	6:22:27 PM	SiCl4 pre valve closed
5/26/2010	6:22:27 PM	SiCl4 post valve closed
5/26/2010	6:22:27 PM	Main Vac valve closed
5/26/2010	6:22:27 PM	Bypass valve closed
5/26/2010	6:22:27 PM	H2 valve opened
5/26/2010	6:22:27 PM	Bubbler valve opened
5/26/2010	6:22:27 PM	Helium MFC set to  0.000000
5/26/2010	6:22:27 PM	H2 MFC set to  500.000000
5/26/2010	6:22:27 PM	BCl3 MFC set to  0.000000
5/26/2010	6:22:27 PM	PHl3 MFC set to  0.000000
5/26/2010	6:22:27 PM	SiCl4 MFC set to  0.000000
5/26/2010	6:22:27 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	6:22:27 PM	Tube furnace set to 750
5/26/2010	6:42:27 PM	H2 valve closed
5/26/2010	6:42:27 PM	BCl3 valve closed
5/26/2010	6:42:27 PM	PH3 valve closed
5/26/2010	6:42:27 PM	SiCl4 pre valve closed
5/26/2010	6:42:27 PM	SiCl4 post valve closed
5/26/2010	6:42:27 PM	Main Vac valve closed
5/26/2010	6:42:27 PM	Bypass valve closed
5/26/2010	6:42:27 PM	Helium valve opened
5/26/2010	6:42:27 PM	Bubbler valve opened
5/26/2010	6:42:27 PM	Helium MFC set to  500.000000
5/26/2010	6:42:27 PM	H2 MFC set to  0.000000
5/26/2010	6:42:27 PM	BCl3 MFC set to  0.000000
5/26/2010	6:42:27 PM	PHl3 MFC set to  0.000000
5/26/2010	6:42:27 PM	SiCl4 MFC set to  0.000000
5/26/2010	6:42:27 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	6:42:27 PM	Tube furnace set to 0
5/26/2010	6:52:32 PM	Run aborted at 6:52 PM
5/26/2010	6:52:32 PM	Helium valve closed
5/26/2010	6:52:32 PM	H2 valve closed
5/26/2010	6:52:32 PM	BCl3 valve closed
5/26/2010	6:52:32 PM	PH3 valve closed
5/26/2010	6:52:32 PM	SiCl4 pre valve closed
5/26/2010	6:52:32 PM	SiCl4 post valve closed
5/26/2010	6:52:32 PM	Bypass valve closed
5/26/2010	6:52:32 PM	Main Vac valve closed
5/26/2010	6:52:32 PM	Bubbler valve closed
5/26/2010	6:52:32 PM	Helium MFC set to  0.000000
5/26/2010	6:52:32 PM	H2 MFC set to  0.000000
5/26/2010	6:52:32 PM	BCl3 MFC set to  0.000000
5/26/2010	6:52:32 PM	PHl3 MFC set to  0.000000
5/26/2010	6:52:32 PM	SiCl4 MFC set to  0.000000
5/26/2010	6:52:33 PM	Tube furnace set to 0
5/26/2010	6:59:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2010	6:59:47 PM	Recipe started at 6:59 PM
5/26/2010	6:59:47 PM	Helium valve closed
5/26/2010	6:59:47 PM	H2 valve closed
5/26/2010	6:59:47 PM	BCl3 valve closed
5/26/2010	6:59:47 PM	PH3 valve closed
5/26/2010	6:59:47 PM	SiCl4 pre valve closed
5/26/2010	6:59:47 PM	SiCl4 post valve closed
5/26/2010	6:59:47 PM	Main Vac valve closed
5/26/2010	6:59:47 PM	Bubbler valve closed
5/26/2010	6:59:47 PM	Bypass valve opened
5/26/2010	6:59:47 PM	Helium MFC set to  0.000000
5/26/2010	6:59:47 PM	H2 MFC set to  0.000000
5/26/2010	6:59:47 PM	BCl3 MFC set to  0.000000
5/26/2010	6:59:47 PM	PHl3 MFC set to  0.000000
5/26/2010	6:59:47 PM	SiCl4 MFC set to  0.000000
5/26/2010	6:59:47 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	6:59:48 PM	Tube furnace set to 0
5/26/2010	7:00:34 PM	Helium valve closed
5/26/2010	7:00:34 PM	H2 valve closed
5/26/2010	7:00:34 PM	BCl3 valve closed
5/26/2010	7:00:34 PM	PH3 valve closed
5/26/2010	7:00:34 PM	SiCl4 pre valve closed
5/26/2010	7:00:34 PM	SiCl4 post valve closed
5/26/2010	7:00:34 PM	Bubbler valve closed
5/26/2010	7:00:34 PM	Main Vac valve opened
5/26/2010	7:00:34 PM	Bypass valve opened
5/26/2010	7:00:34 PM	Helium MFC set to  0.000000
5/26/2010	7:00:34 PM	H2 MFC set to  0.000000
5/26/2010	7:00:34 PM	BCl3 MFC set to  0.000000
5/26/2010	7:00:34 PM	PHl3 MFC set to  0.000000
5/26/2010	7:00:34 PM	SiCl4 MFC set to  0.000000
5/26/2010	7:00:34 PM	Bypass solenoid MFC set to  0.000000
5/26/2010	7:00:34 PM	Tube furnace set to 0
5/26/2010	7:00:34 PM	Run finished at 7:00 PM
5/26/2010	7:00:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
